Microsensors

16The emergent field of microsensors has grown rapidly over the past 10 years. This book updates the successful first edition to cover the fundamental principles, developments and applications of microsensors. Two new chapters provide coverage of both CMOS device processing technologies and smart sensors, in particular BioMEMS and the system-on-a-chip, lab-on-a-chip, and nose-on-a-chip. Other new sections update the treatment of optical and magnetic sensors, MOEMS and smart sensor interfacing. Worked examples are included to illustrate key processes and applications. The end-of-chapter problems are be revised and updated.This is an increasingly important area of research and development. Microsensors are a growing aspect of Microelectronics courses at final year undergraduate and postgraduate level.